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Randal Mulder, Freescale Semiconductors
Live, online, Wednesday November 12th
1pm U.S. California
(check time in your area) |
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Atomic Force Probe Analysis of Non-Visible Defects in Sub-100nm
CMOS Technologies |

In this online presentation, Mr. Mulder will demonstrate how Atomic Force Probing was used to characterize failing sub-100nm transistors, identify possible failure mechanisms and, allow device/process engineers to make adjustments to the wafer fabrication process to correct the problem, even though physical analysis with SEM/TEM was not able to image and identify a failure mechanism. | |
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