afp product specifications
Ease of Use
Qualified technology nodes: 250nm to below 20nm
Probe touch-down: Force feedback
Probe motion control: Automatic, mouse positioning
Positioning resolution: <5nm
Measurement repeatability: <1mV, <100fA
Measurement accuracy: 500fA, better with some care.
Initial probe resistance: Depends on the probe type
Tool uptime: Greater than 95%
MTBF: 1,000 hours
Installation and testing: 10 days
Simultaneous fault localization: PicoCurrent, SCM
Fault confirmation: IV Curves
CAD Navigation integration
